发明名称
摘要 A method of producing a doped diamond, typically a boron doped diamond, is provided. The method involves multiple cold implantation/rapid annealing steps. A doped diamond can be produced containing a high concentration of dopant atoms.
申请公布号 JP3434852(B2) 申请公布日期 2003.08.11
申请号 JP19930173554 申请日期 1993.06.07
申请人 发明人
分类号 C30B29/04;C30B31/22;C30B33/00;H01L21/04;H01L21/265 主分类号 C30B29/04
代理机构 代理人
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