| 摘要 |
A plane vibrator (5) of an angular velocity sensor (2) and a movable member (20) of an acceleration sensor (3) are provided in a spaced floating state on the same substrate (4). A lid (30) is formed so as to cover and be spaced from the upper side of the plane vibrator (5) and the movable member (20). A space defined by the substrate (4) and the lid (30) is sectioned into a angular velocity sensor space (33) and an acceleration sensor space (34) by use of a sectioning wall (36). The angular velocity sensor space (33) is hermetically sealed to be in the vacuum state. The acceleration sensor space (34) is hermetically sealed to be under atmospheric pressure. The plane vibrator (5) is vibrated at a high frequency and a large amplitude so that the angular velocity detection sensitivity is enhanced. The movable member (20), even if vibration of the plane vibrator (5) is transmitted thereto, is prevented from vibrating at a high frequency and a large amplitude, due to the damping effect of air. Thus, the acceleration detection sensitivity is enhanced. <IMAGE> |
