| 摘要 |
<p>PROBLEM TO BE SOLVED: To modify the surface layer compsn. of the object to be coated by a sublimable substance to be interacted with it and to obtain a functional thin film having uniform film thickness and compsn. SOLUTION: As to the method for modifying a surface layer, the surface layer compsn. 1 of the object to be coated and a sublimable substance 2 to be interacted with it are placed in a closed space, moreover, the state of the inside of the space is made into the one of saturated subliming pressure of the sublimable substance 2, the vapor of the sublimable substance 2 is adhered to the surface layer compsn. 1 on the surface of the object to be coated, the adhered sublimable substance 2 is moreover infiltrated and dispersed from the surface of the surface layer compsn. 1 to the inside of the surface layer and is interacted with the surface layer compsn. 1.</p> |
