发明名称 METHOD FOR DETERMINING OPTIMUM BONDING PARAMETERS FOR BONDING WITH WIRE BONDER
摘要 <p>A method for finding optimum bond parameters for a bond force F<SUB>B </SUB>and an ultrasonic variable P and, optionally, at least one further bond parameter of a wire bonder uses a sensor sensitive to a shear force exerted by the capillary on a connection point. A predetermined number of bonding operations with varying bonding parameters is performed. Optimum bond parameters are derived from the signal of the sensor.</p>
申请公布号 KR20030066344(A) 申请公布日期 2003.08.09
申请号 KR20030004036 申请日期 2003.01.21
申请人 发明人
分类号 H01L21/60;B23K20/00;H01L21/607 主分类号 H01L21/60
代理机构 代理人
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