发明名称 AQUEOUS DISPERSION CONTAINING SILICON POWDER COATED WITH CERIUM OXIDE, METHOD OF PRODUCING THE SAME AND METHOD FOR CHEMICAL-MECHANICAL POLISHING METHOD USING THE SAME
摘要 <p>Aqueous dispersion contains a powder obtained by mixing, preferably spraying, a core of doped pyrogenic silica with a cerium (Ce) salt solution or suspension to form a Ce oxide shell. The powder in the dispersion has an average secondary particle size not more than 0.2 micron. An Independent claim is also included for the production of the aqueous dispersion by predispersing the powder in an aqueous medium, optionally in conjunction with additives, then dispersing the predispersion.</p>
申请公布号 KR20030066447(A) 申请公布日期 2003.08.09
申请号 KR20030006747 申请日期 2003.02.04
申请人 发明人
分类号 B24B37/00;C09K3/14;B01J13/00;C09C1/30;C09G1/02;H01L21/304;H01L21/3105 主分类号 B24B37/00
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