| 摘要 |
PROBLEM TO BE SOLVED: To actualize a force detecting element with a wide detection range capable of detecting a small force with fine resolution and furthermore capable of detecting a large force with coarse resolution. SOLUTION: This force detecting element 101 comprises a first semiconductor block 120 having a mesa step 122 formed on its surface and having gauge resistance 124a and 124c each exerting a piezo-resistance effect and formed on the step 122, a first force transmitting block 128 anode-joined to top surfaces of the step 122 of the block 120, a second semiconductor block 130 having a mesa step 132 formed on its surface and having gauge resistance 134a and 134c formed on the step 132, and a second force transmitting block 138 anode- joined to top surfaces of the step 132 of the block 130, with these blocks being layered in order. The gauge resistance 124a and 124c are different from the gauge resistance 134a and 134c in the amount of change in resistance values relative to force acting on the element 101. COPYRIGHT: (C)2003,JPO
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