| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a field emission electron source having proper field emission characteristics, using a graphite sheet composed of an aromatic polymer film as a raw material, and to provide a manufacturing method thereof. <P>SOLUTION: The field emission electron source having proper field emission characteristics can be formed easily, by using a graphite sheet having a protruded and recessed structure on its surface as an emitter 12 of an field emission element 11. By forming holes, slits, and grooves in the aromatic polymer film of the raw material and heat-treating the surface of the graphite sheet, the field emission electron source having the superior field emission characteristics can be formed by using the graphite sheet. <P>COPYRIGHT: (C)2003,JPO</p> |
