DUMMY HEATING METHOD OF HEAT TREATMENT FURNACE

摘要

PROBLEM TO BE SOLVED: To provide a technology capable of reducing contamination in a heat treatment furnace caused by various metals easily and effectively without causing the corrosion of components in the heat treatment furnace and without requiring any extra incidental facility. SOLUTION: In the dummy heating method of a heat treatment furnace, dummy heating is performed by supplying mixture gas produced by adding hydrogen to an inert gas at a concentration lower than the lower limit of explosion. Ar, He or Xe is preferably employed as the inert gas and dummy heating is performed for 30-480 min at a temperature of 850-1,050°C. COPYRIGHT: (C)2003,JPO