| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a small and inexpensive ammonia gas measurement device having high measurement accuracy. <P>SOLUTION: This gas measurement device is provided with: a first laser beam source for outputting a wavelength ofλ1; a second laser beam source for outputting a wavelength ofλ2; a nonlinear crystal for generating and outputting a wavelength ofλ3 absorptive for at least a measurement object gas by inputting the two wavelengths; a filter for passing the wavelength ofλ3 out of light outputted from the nonlinear crystal; a gas cell with the measured gas for inputting the laser beam passing the filter introduced; and a light receiving element for receiving the light passing the gas cell. The concentration of the measured gas is measured with the pressure in the gas cell lowered to 0.3 atm. or below. <P>COPYRIGHT: (C)2003,JPO</p> |
