| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide high speed, wide area, and highly accurate positioning stage device which eliminates an error by definitive elements such as ununiformity in the surface processing accuracy of a bar mirror and so on, and prevents the error from accumulation of uncertain elements such as the fluctuation of air and so on, in case of switching of a laser interferometer. <P>SOLUTION: In case of switching an X1 laser interferometer 5a which is a first position measurement means and an X2 laser interferometer 5b which is a second position measurement means, in the place where at least two position measurement means become effective, when the value is taken over from the X1 laser interferometer 5a which was effective so far to the X2 laser interferometer 5b which becomes effective from now, the error by the influence of the flatness of an X bar mirror 3 and/or the error by the fluctuation of air is calculated from the compensation function of the X bar mirror 3, a table, and/or the average of measurement values, and so on. The value of the X2 laser interferometer 5b which becomes effective from now is compensated by the compensation means such as a calculation device 9 and so on. <P>COPYRIGHT: (C)2003,JPO</p> |
