ROUTING METHOD, WRITING SYSTEM, IMAGING APPARATUS AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To easily determine a preferable route passing a plurality of writing points. SOLUTION: The writing system 1 for writing a pattern on a semiconductor substrate 9 comprises a head section 2 projecting a writing electron beam, and a computer 4 performing arithmetic operation. A program for determining a route passing a plurality of writing points on the substrate 9 is prepared previously in the computer 4. The program divides a region scattered with the writing points into a plurality of stripe sub-regions, determines a route in each sub-region using a routing algorithm and then connects the routes of respective sub-regions. Consequently, the writing system 1 can write on the substrate 9 efficiently. COPYRIGHT: (C)2003,JPO