PROCEDE DE FABRICATION D'UN SUBSTRAT DE LANGASITE, SUBSTRAT MONOCRISTALLIN ET DISPOSITIF PIEZOELECTRIQUE

摘要

A method for manufacturing a langasite single crystal substrate comprises the steps of polishing at least one of the main surfaces of a raw material substrate; and wet-etching said polished main surface of the substrate with a solution including H3PO4, HNO3 and CH3COOH.