| 摘要 |
PROBLEM TO BE SOLVED: To solve the problems of a process of manufacturing an optical scanner manufactured by introducing a micro-machining technology, and to provide the optical scanner having high machining accuracy and high yield. SOLUTION: As for the optical scanner constituted of a casing frame, an insulator arranged on the upper surface of the frame, fixed electrodes separately arranged on counter sides of the upper surface of the insulator, torsion beam supporting parts arranged on respective sides orthogonal to the sides where the fixed electrodes are arranged, torsion beams extending from respective torsion beam supporting parts and arranged on the same straight line, and a mirror substrate joining to the torsion beams and also provided with movable electrodes positioned opposite to the fixed electrodes, and also, provided with a reflection surface on the upper surface, and wherein the mirror substrate is vibrated backward and forward by taking the torsion beam as a torsion rotary shaft by an electrostatic attracting force generated between the fixed electrode and the movable electrode, the optical scanner is provided with at least one communicating port linking between the inside and outside of the casing frame. COPYRIGHT: (C)2003,JPO
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