| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that an error of at least±0.5 pixel is generated because measurement resolution can not be reduced below one pixel. SOLUTION: An error function of a reference image is determined, and high resolution is imparted to the error function by interpolation operation. An error function between the reference image and a measuring image is determined, and an error function between the error function and the error function of the reference image to which high resolution is imparted is operated, and the shift quantity between the reference image and the measuring image is determined from the error function, and displacement is calculated from the shift quantity. Hereby, high resolution and high accuracy can be realized. COPYRIGHT: (C)2003,JPO
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