PROCEDE DE DEPOT DE REVETEMENT PAR PLASMA, DISPOSITIF DE MISE EN OEUVRE DU PROCEDE ET REVETEMENT OBTENU PAR UN TEL PROCEDE

摘要

The invention concerns in particular a method for using low pressure plasma to deposit a coating on an object to be treated, whereby the plasma is obtained by partially ionising, under the action of an electromagnetic field, a reaction fluid injected under low pressure into a treatment zone. The invention is characterised in that the method comprises at least two steps: a first step during which the reaction fluid is injected into the treatment zone at a first flow rate and under a given pressure, and a second step during which the same reaction fluid is injected into the treatment zone at a second flow rate lower than the first.