ELECTRONIC DEVICE, IDENTIFICATION METHOD OF POSITION INFORMATION, PROBING METHOD OF SEMICONDUCTOR INTEGRATED CIRCUIT AND MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To conduct the measurement estimation of an electronic device with high efficiency. SOLUTION: A substrate, the m-number (m: integer) of lines 11a to 20a which are arranged repeatedly on the substrate at practically constant pitches, and pads 11b, 13b, 15b, 17b and 19b which are connected with ends or middle portions of the lines and have widthes different from the line widthes of corresponding lines. Topology which each of the pads has, topology which a relation between each of the pads and the lines having specified position relation has, or topology which a relation between each of the pads and its adjacent pad has is made to be a peculiar identification pattern of each of the pads. A positive integer of at least 2 which satisfies a relation of n≪m is made n. When n-kinds of identification patterns exist, n-value information, which is obtained by selecting one of identification patterns from among the n-kinds, is made to be position information of each of the pads. COPYRIGHT: (C)2003,JPO