| 摘要 |
PROBLEM TO BE SOLVED: To provide a phase measuring system capable of measuring with ease and high precision the phase characteristics of a film provided on a curved or plane mirror. SOLUTION: The phase measuring system has a light source, a branch grating for branching the flux from the light source into a plurality of fluxes and for guiding them to a plurality of positions on a subject with a film applied to its surface, a combination grating for combining two reflections from two neighboring points on the subject, and a detecting means for detecting interference data involving the combined fluxes. Based on the interference data collected by the detecting means, phase data which are dependent on the position of the film on the subject are determined. COPYRIGHT: (C)2003,JPO
|
