发明名称 MAGNETIC RECORDING MEDIUM, LUBRICATION FILM AND MAGNETIC RECORDING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a magnetic recording medium that has a lubrication film adhered strongly on the surface of the protective film but any combination is hard to stick on it. SOLUTION: The magnetic recording medium is manufactured in the following alternative processes. After a lubrication film is formed, a protective film and the lubrication film are oxidized or nitrogenized and the magnetic recording medium is exposed to a CF<SB>4</SB>plasma. Or after a protective film is formed, the protective film is oxidized or nitrogenized, then a lubrication film is formed, and the magnetic recording medium is exposed to the CF<SB>4</SB>plasma. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003223710(A) 申请公布日期 2003.08.08
申请号 JP20020017569 申请日期 2002.01.25
申请人 FUJITSU LTD 发明人 ITAI YUICHIRO;KASAMATSU YOSHIHARU
分类号 C23C14/58;C23C16/56;G11B5/72;G11B5/725;G11B5/84;(IPC1-7):G11B5/725 主分类号 C23C14/58
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