摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic recording medium that has a lubrication film adhered strongly on the surface of the protective film but any combination is hard to stick on it. SOLUTION: The magnetic recording medium is manufactured in the following alternative processes. After a lubrication film is formed, a protective film and the lubrication film are oxidized or nitrogenized and the magnetic recording medium is exposed to a CF<SB>4</SB>plasma. Or after a protective film is formed, the protective film is oxidized or nitrogenized, then a lubrication film is formed, and the magnetic recording medium is exposed to the CF<SB>4</SB>plasma. COPYRIGHT: (C)2003,JPO
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