发明名称 |
Method of using photolithography and etching for forming a nozzle plate of an inkjet print head |
摘要 |
A method of forming a nozzle plate of an inkjet print head. A silicon chip is provided with an activated device and a first film is formed on the silicon chip, with a first opening corresponding to the activated device. Then, a second film is formed on the first film. Next, a photoresist layer is formed on the second film, such that the photoresist layer has a second opening corresponding to the first opening. Next, the second film under the second opening of the photoresist layer is etched to form a via in the second film passing through the first opening.
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申请公布号 |
US2003145464(A1) |
申请公布日期 |
2003.08.07 |
申请号 |
US20030348630 |
申请日期 |
2003.01.22 |
申请人 |
LINLIU KUNG;YANG MING-HSUN;YANG ARNOLD CHANG-MOU;CHEN GUEY-CHYUAN;HSU CHIH-CHIEH |
发明人 |
LINLIU KUNG;YANG MING-HSUN;YANG ARNOLD CHANG-MOU;CHEN GUEY-CHYUAN;HSU CHIH-CHIEH |
分类号 |
B41J2/16;(IPC1-7):B23P17/00;B21D53/76 |
主分类号 |
B41J2/16 |
代理机构 |
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