发明名称 GaN COMPOUND SEMICONDUCTOR CRYSTAL MAKING METHOD
摘要 <p>A method for growing a GaN compound semiconductor crystal on the surface of a substrate which is a rare-earth group XIII (IIIB) perovskite crystal containing one or more rare earth elements, wherein the thickness of the substrate is 250 µm or less and the stress exerted by the substrate on the GaN thick-film crystal is decreased by the difference in the coefficient of thermal expansion.</p>
申请公布号 WO2003065429(P1) 申请公布日期 2003.08.07
申请号 JP2002011772 申请日期 2002.11.12
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