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发明名称
Fördereinrichtung für den berührungslosen Transport von Bauteilen aus Kunststoff, Halbleitermaterial oder Metall
摘要
申请公布号
DE10038611(C2)
申请公布日期
2003.08.07
申请号
DE20001038611
申请日期
2000.08.08
申请人
FORSCHUNGSZENTRUM KARLSRUHE GMBH
发明人
GENGENBACH, ULRICH;BOOLE, JAMES CHARLES
分类号
B65G51/03;H01L21/677;(IPC1-7):B65G54/02;H02N1/00
主分类号
B65G51/03
代理机构
代理人
主权项
地址
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