发明名称 Method and system for detecting defects
摘要 Method for detecting defects, the method comprising the procedures of identifying theoretically-symmetrical windows in an object-image; analyzing the theoretically-symmetrical windows according to expected symmetry of the theoretically-symmetrical windows; and determining the presence of defects according to a deviation from the expected symmetry.
申请公布号 US2003149947(A1) 申请公布日期 2003.08.07
申请号 US20020072313 申请日期 2002.02.07
申请人 APPLIED MATERIALS, INC. 发明人 SARIG NIMROD
分类号 G03F1/00;G06T7/00;G06T7/60;(IPC1-7):G06F17/50 主分类号 G03F1/00
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