发明名称 PIXEL STRUCTURE
摘要 A pixel structure comprising a thin film transistor, a pixel electrode, a scan line, a data line and an alignment mark. The alignment mark is formed beneath the data line. Misalignment is assessed through the degree of shifting between the alignment mark and the data line relative to each other. In addition, misalignment is also gauged through the degree of shifting between the alignment mark and the channel layer within the thin film transistor relative to each other.
申请公布号 US2003146475(A1) 申请公布日期 2003.08.07
申请号 US20030248413 申请日期 2003.01.17
申请人 LAI HAN-CHUNG 发明人 LAI HAN-CHUNG
分类号 G03F7/20;H01L21/77;H01L21/84;H01L23/544;H01L27/12;(IPC1-7):H01L29/788;H01L23/62 主分类号 G03F7/20
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