发明名称 ACCELERATION SENSOR
摘要 An acceleration sensor comprising an oscillator (12) polarized in one direction and a weight (10) provided continuously to this oscillator is provided on the first plane of the oscillator with a pair of electrodes (14, 16) adjacent in a polarizing direction. This pair of electrodes is located on the diagonal line of the first plane. This electrode constitution realizes a nondirectional acceleration sensor because of the development of voltage across the pair of electrode regardless of the impressing direction of voltage in the three axes of the oscillator. The three−axis direction sensitivity is easily adjusted by adjusting the size of the pair of electrodes to the oscillator.
申请公布号 WO03065053(A1) 申请公布日期 2003.08.07
申请号 WO2002JP10780 申请日期 2002.10.17
申请人 FUJITSU MEDIA DEVICES LIMITED;KATO, TAKASHI;YACHI, MASANORI;TANAKA, HIROSHI 发明人 KATO, TAKASHI;YACHI, MASANORI;TANAKA, HIROSHI
分类号 G01P15/09;G01P15/18;H01L41/08;H01L41/18;H01L41/187 主分类号 G01P15/09
代理机构 代理人
主权项
地址