发明名称 Pressure sensor with a radially tensioned metal diaphragm
摘要 A pressure sensor having a radially tensioned diaphragm for measuring fluid pressure. The pressure sensor includes a first generally concave metal body member and a second generally concave metal body member, and a radially tensioned flexible metal diaphragm disposed therebetween that is tensioned by heating the sensor. The first and second body members are formed from a material having a coefficient of thermal expansion in the range of approximately 0.0000056 inch/inch/� F. to 0.0000064 inch/inch/� F. The diaphragm is formed from a precipitation hardening metal material having a coefficient of thermal expansion of approximately 0.0000060 inch/inch/� F. The first body member and the second body member are formed from a ferromagnetic metal material such that the first and second body members shield the diaphragm from magnetic fields which may otherwise cause movement of the diaphragm.
申请公布号 US2003145656(A1) 申请公布日期 2003.08.07
申请号 US20020067033 申请日期 2002.02.04
申请人 TROYER TERRENCE J. 发明人 TROYER TERRENCE J.
分类号 G01L9/12;G01L7/08;G01L9/00;G01L9/04;G01L19/14;(IPC1-7):G01L7/08 主分类号 G01L9/12
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