| 发明名称 |
Aufnahmeteller für einen Wafer und Wafer-Hebevorrichtung |
| 摘要 |
The tray (1) for a wafer lifting unit is provided with an edge section which extends practically over the entire circumference of the tray and has a contour shaped as an interrupter edge (8) for liquid flows. An Independent claim is also included for a wafer lifting unit incorporating such a tray. |
| 申请公布号 |
DE10134988(C2) |
申请公布日期 |
2003.08.07 |
| 申请号 |
DE2001134988 |
申请日期 |
2001.07.18 |
| 申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
HUNGER, RUEDIGER;TEICHGRAEBER, LUTZ |
| 分类号 |
B24B37/04;B24B37/34;H01L21/687;(IPC1-7):H01L21/302;H01L21/68 |
主分类号 |
B24B37/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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