发明名称 Apparatus for devices for determining properties of applied layers
摘要 The invention relates to an apparatus for devices for determining properties of thin layers applied on a substrate. This apparatus comprises two changing magazines wherein one magazine is provided for crystal resonators and the other magazine for test glasses. The changing magazine for crystal resonators has the form of a disk and is encompassed by the annular magazine for test glasses. Both can be rotated independently of one another. Each position of the magazines can be reproduced with the aid of sensors and evaluation devices. Consequently, it is possible to carry out multiple coatings.
申请公布号 US2003147084(A1) 申请公布日期 2003.08.07
申请号 US20030347715 申请日期 2003.01.20
申请人 WIRTH ECKHARD 发明人 WIRTH ECKHARD
分类号 G01B11/06;C23C14/54;C23C14/56;G01B21/08;H03H3/02;(IPC1-7):G01B11/02 主分类号 G01B11/06
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