Mikromechanischer Drehratensensor

摘要

The invention relates to a micromechanical rotation speed sensor, comprising a first Coriolois mass element (2a) and a second Coriolis mass element (2b), arranged above the surface of a substrate (100), a drive device by means of which the first Coriolis mass element (2a) and the second Coriolis mass element (2b) may be driven in oscillation along a first axis (x) and a recording device by means of which the displacements of the first Coriolis mass element (2a) and the second Coriolis mass element (2b) may be recorded along a second axis (y) which is perpendicular to the first axis (x) as a result of the correspondingly-acting Coriolis force. The first axis (x) and the second axis (y) run parallel to the surface of the substrate (100), the recording device comprises a first recording mass device (3a, 3a`) and a second recording mass device (3b, 3b`) and the centre of gravity of the first Coriolis mass element (2a), the second Coriolis mass element (2b), the first recording mass device (3a, 3a`) and the second recording mass device (3b, 3b`) coincide at a common centre of mass (SP) in the idle state.