发明名称 |
SURFACE ACOUSTIC WAVE DEVICE HAVING IMPROVED PERFORMANCE AND METHOD OF MAKING THE DEVICE |
摘要 |
A surface acoustic wave device includes a transducer electrode formed on a substrate. In one aspect, the electrode has a plurality of layers. At least one of the layers is metal and another of the layers is a material for providing a hardening effect to the metal layer by reinforcement with Al2O3 precipitates. In another aspect, the electrode is electrically connected to a metal component that permits electrical connection of the surface acoustic wave device to an electrical device external to the surface acoustic wave device. The electrode has a metal portion of a first metallization. The component is of a second, different metallization. In other aspects, the surface acoustic wave device is made via a method to have such structural aspects. |
申请公布号 |
CA2468724(A1) |
申请公布日期 |
2003.08.07 |
申请号 |
CA20032468724 |
申请日期 |
2003.01.14 |
申请人 |
UNAXIS BALZERS LIMITED |
发明人 |
LAMBERT, CHRISTIAN;KREBS, PHILIPPE;JACOT, PHILIPPE |
分类号 |
H01L41/09;H01L41/18;H01L41/22;H03H3/08;H03H9/02;H03H9/145;H03H9/25;(IPC1-7):H03H9/02 |
主分类号 |
H01L41/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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