| 摘要 |
The robot includes a substantially vertical linear track and a bearing configured to translate along the linear track. Also included is an elongate arm having opposing first and second ends. The elongate arm is rotatably coupled to the bearing near the first end. A platform, configured to receive a wafer handling robot, is rotatably coupled to the elongate arm near the second end of the elongate arm. A linear drive, configured to translate the bearing along the linear track, is coupled to the bearing.
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