APPARATUS AND SYSTEM FOR SENSING DATA SIGNALS USING CANTILEVER FOR DATA STORING

摘要

PURPOSE: An apparatus and a system for sensing data signals using a cantilever for data storing are provided to sense data at a low power and improve data scan and storing speed. CONSTITUTION: A cantilever is connected with a silicon support(20) for having a tip(27) at a front end. A piezo sensor resistance(R1) is formed at the cantilever. A dummy resistance(R2) is electrically connected with the piezo sensor resistance and formed on the silicon support. One side terminal(26) of the piezo sensor resistance is connected with power supply and the other side terminal of the piezo sensor resistance is connected with one side terminal(25) of the dummy resistance so that a sensing voltage having sensed data is output between the piezo sensor resistance and the dummy resistance.