发明名称 Semiconductor memory with strip-shaped cell plate
摘要 The memory has memory cells in a substrate (10). Each memory cell contains a selection transistor (15-17) and a trench capacitor (12-14). The memory electrodes (12) of a substrate region are formed along the walls of the trench (11). A cell pate forming the common counter electrode for several memory cells is made from a conducting film inside the trench. The cell plate (14) has a strip-shaped structure (14i) on the substrate surface.
申请公布号 EP0945903(A3) 申请公布日期 2003.08.06
申请号 EP19990103607 申请日期 1999.02.24
申请人 INFINEON TECHNOLOGIES AG 发明人 OWEN, RICHARD
分类号 H01L27/108 主分类号 H01L27/108
代理机构 代理人
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