发明名称 POSITION DETECTION METHOD, POSITION DETECTION DEVICE, EXPOSURE METHOD, EXPOSURE SYSTEM, CONTROL PROGRAM, AND DEVICE PRODUCTION METHOD
摘要 While moving a plurality of areas having a predetermined positional relation with each other on a viewing coordinate system, a degree-of-coincidence calculating unit, based on the result of a viewing unit viewing an object, calculates the degree of inter-area coincidence in at least one pair of viewing-result parts out of viewing-result parts in the plurality of areas in light of given inter-area symmetry therein (steps 151 through 160), and a position-information calculating unit obtains the position information of the object by obtaining the position of the plurality of areas at which the degree of inter-area coincidence, which is a function of the position of the plurality of areas in the viewing coordinate system, takes on, for example, a maximum, (step 161). As a result, the position information of the object is accurately detected. <IMAGE>
申请公布号 EP1333246(A1) 申请公布日期 2003.08.06
申请号 EP20010974891 申请日期 2001.10.19
申请人 NIKON CORPORATION 发明人 NAKAJIMA, SHINICHI
分类号 G01B11/03;G03F9/00;(IPC1-7):G01B21/00;H01L21/027;G03F7/20 主分类号 G01B11/03
代理机构 代理人
主权项
地址