Method of removing antireflective compositions,申请号EP20010301617-传众专利搜索

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发明名称	Method of removing antireflective compositions
摘要	Disclosed are compositions useful for removing antireflective compositions from a substrate. Also disclosed are methods of removing antireflective compositions from a substrate using such compositions.
申请公布号	EP1150172(A3)	申请公布日期	2003.08.06
申请号	EP20010301617	申请日期	2001.02.22
申请人	SHIPLEY COMPANY LLC	发明人	SAHBARI, JAVAD J.;RUTTER, EDWARD, W. JR.;CALVERT, JEFFREY M.
分类号	G03F7/11;B05D3/00;B05D7/00;C09D9/00;G03F7/42;H01L21/027;H01L21/30	主分类号	G03F7/11
代理机构		代理人
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