发明名称 |
Lots dispatching method for variably arranging processing equipment and/or processing conditions in a succeeding process according to the results of a preceding process and apparatus for the same |
摘要 |
A lot dispatching method and system for variably applying the most suitable processing equipment and/or processing condition in a succeeding process of a semiconductor manufacturing process, wherein the succeeding process is influenced by the result of a preceding process. A lot processed by the preceding process is dispatched to the succeeding processing equipment according to a systematic analysis result obtained from a relationship between a process result of the preceding process and an efficiency and the characteristics of a plurality of processing equipment in the succeeding process. A plurality of process conditions for the succeeding process corresponding to the performance of the preceding process is provided. A respective process condition has characteristics that minimize the difference in performance in the succeeding process from a desired or target performance. By systematically analyzing the quality of the lot waiting to be dispatched, the succeeding process is performed with the most suitable process condition.
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申请公布号 |
US6604012(B1) |
申请公布日期 |
2003.08.05 |
申请号 |
US20000644294 |
申请日期 |
2000.08.23 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
CHO DAE-SIK;CHAE HEE-SUN;KIM SEOK-HYUN;TONG SEUNG-HOON;YOON TAE-YANG;KWAK DOH-SOON;KANG HEE-SE;PARK YLL-SEUG;OH JAE-SEOK |
分类号 |
H01L21/66;G05B19/418;H01L21/02;(IPC1-7):G06F19/00 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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