发明名称 Method of producing a semiconductor layer on a substrate
摘要 A method of producing a semiconductor layer onto a semiconductor substrate. The method comprises providing a first semiconductor substrate, and providing a second semiconductor substrate. The method also comprises producing a porous layer, which has a porosity profile, on top of the first semiconductor substrate, and producing a porous layer, which has a porosity profile, on top of the second semiconductor substrate. The method further comprises bringing the porous layer of the second substrate into contact with the porous layer of the first substrate, so as to form a bond between the two substrates, performing a thermal annealing step, and lifting off of the second substrate, leaving a layer of the second substrate's semiconductor material attached to the first substrate.
申请公布号 US6602760(B2) 申请公布日期 2003.08.05
申请号 US20010032335 申请日期 2001.12.19
申请人 INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM (IMEC);UMICORE 发明人 POORTMANS JEF;FLAMAND GIOVANNI;BILYALOV RENAT
分类号 H01L21/762;(IPC1-7):H01L21/46 主分类号 H01L21/762
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