Acceleration sensor

摘要

An acceleration sensor which can improve precision during self-diagnosis operation. The acceleration sensor includes an amplifier circuit which amplifies a detection signal obtained by converting changes in capacitance between a movable electrode and a self-diagnosis electrode into an electric signal to output the amplified signal as a self-diagnosis signal. The amplifier factor of the amplifier circuit during self-diagnosis operation is controlled to be greater than the factor during non-self-diagnosis operation.