| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for purifying carbonyl difluoride (COF<SB>2</SB>) useful for a reagent for organic synthesis, a cleaning gas for a semiconductor manufacturing apparatus, an etching gas, or the like. <P>SOLUTION: Carbonyl difluoride containing at least trifluoromethyl hypofluorite (CF<SB>3</SB>OF) as impurities is allowed to be contacted with active carbon. <P>COPYRIGHT: (C)2003,JPO |
