发明名称 |
Method of manufacturing sensor having membrane structure |
摘要 |
A sensor for measuring a physical amount such as an amount of air includes a membrane structure composed of metal stripes sandwiched between first and second insulating layers. A metal layer made of platinum or the like is formed on the first insulating layer and then heat-treated to improve its properties. Then, the metal layer is etched into a form of the metal stripes. The second insulating layer made of a material such as silicon dioxide is formed on the etched metal stripes. Since the metal layer is heat-treated before it is etched into the form of metal stripes, the metal stripes are not deformed by the heat-treatment. The second insulating layer can be formed on the metal stripes without generating cracks in the second insulating layer.
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申请公布号 |
US6602428(B2) |
申请公布日期 |
2003.08.05 |
申请号 |
US20010991986 |
申请日期 |
2001.11.26 |
申请人 |
DENSO CORPORATION |
发明人 |
WADO HIROYUKI;SUGIURA MAKIKO;YAMAMOTO TOSHIMASA;TAKEUCHI YUKIHIRO;KOHNO YASUSHI |
分类号 |
B81B3/00;G01F1/684;G01L9/00;(IPC1-7):H01L21/00;B44C1/22;C23F1/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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