发明名称 METHOD FOR PRODUCING CALCIUM FLUORIDE CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide a method for producing a calcium fluoride crystal in which the transmittance through the crystal at a wavelength for use can be improved. SOLUTION: In production processes for purifying, growing and annealing the calcium fluoride crystal, the scavengers to be used as antioxidants are added such that a solid-powdered scavenger and a gas scavenger are added both at the same time or each at different times, wherein the solid-powdered scavenger comprises one of carbon, Teflon (R), and zinc fluoride, or mixtures thereof; and the gas scavenger comprises hydrogen fluoride, carbon fluoride and fluorine. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003221297(A) 申请公布日期 2003.08.05
申请号 JP20020023199 申请日期 2002.01.31
申请人 CANON INC 发明人 KUWABARA TETSUO
分类号 C30B29/12;(IPC1-7):C30B29/12 主分类号 C30B29/12
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