发明名称 |
High sensitivity optical inspection system and method for detecting flaws on a diffractive surface |
摘要 |
An improved high sensitivity optical inspection system for detecting flaws on a diffractive surface containing surface patterns includes: a first and a second illumination means for illuminating predetermined regions on the diffractive surface to generate a scattered intensity distribution in response to either a flaw or a surface pattern; means for detecting the intensity level of the scattered intensity distribution at a plurality of locations about the diffractive surface; means for establishing a minimum detected intensity level; means, responsive to the minimum detected intensity level, for indicating the absence of a flaw on the illuminated region of the diffractive surface when the minimum detected intensity level is below a threshold intensity level and for indicating the presence of a flaw on the illuminated region of the diffractive surface when the minimum detected intensity level exceeds the threshold intensity level; and means for moving the diffractive surface to generate a scan pattern on the diffractive surface to inspect the entire surface.
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申请公布号 |
US6603542(B1) |
申请公布日期 |
2003.08.05 |
申请号 |
US20000688056 |
申请日期 |
2000.10.13 |
申请人 |
QC OPTICS, INC. |
发明人 |
CHASE ERIC;ORMSBY JAY;BOUDOUR ABDU;BROUDE SERGEY;QUACKENBOS LLOYD |
分类号 |
G01N21/95;G01N21/956;G06T1/00;H01L21/66;(IPC1-7):G01N21/00 |
主分类号 |
G01N21/95 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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