| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement element wherein, with no drop of resonance frequency, the displacement amount at a movable part is increased, and the displacement locus of the movable part is almost parallel to a fixed part, and to provide a sensor element for precision detecting a vibration at the movable part. SOLUTION: A piezoelectric/electrostrictive device comprising a hole is provided which comprises a drive part 3 driven by displacement of a piezoelectric/ electrostrictive element 2, a movable part 4 actuated by the drive part, a fixed part 5 for supporting the drive part and the movable part, and a hole part which comprises, with the movable part connected to the fixed part through the drive part, inside walls of the drive part, movable part, and fixed part. Here, the drive part 3 is a piezoelectric/electrostrictive element comprising a pair of facing thin-plate parts 6 and 7, a pair of electrodes 2b and 2c provided at least at a part of one outside surface of them, and a piezoelectric/ electrostrictive layer 2a. The piezoelectric/electrostrictive device meets 1<Y1/Y2<=20, where Y1 is Young's modulus of a material constituting the thin-plate part and Y2 is that of material constituting the piezoelectric/ electrostrictive layer. |
