FLAT PANEL DISPLAY DEVICE AND METHOD FOR FORMING PROTECTIVE LAYER THEREOF

摘要

PURPOSE: A flat panel display device and a method for forming a protective layer thereof are provided to maintain a lifetime and a characteristic by forming a protective layer in a low temperature process. CONSTITUTION: A flat panel display device is fabricated on a substrate(100). The flat panel display device formed on the substrate is transferred to a process chamber in order to form a protective layer(118). A plurality of precursors including elements of the protective layer are injected into the chamber. The protective layer of an inorganic insulating layer is formed under the temperature of 20 to 220°C by using an atomic layer deposition method using a surface reaction between the precursors. The flat panel display device is an organic electro-luminescent device including the first electrode(102), an electro-luminescent layer, and the second electrode(114). The protective layer is formed by stacking an organic insulating layer and a protective metal layer(116) to the inorganic insulating layer.