| 摘要 |
PURPOSE: A wafer transfer apparatus is provided to prevent the collision between the wafer and the handler by sensing the position of a wafer on a shifting line of a handler to stop the movement of the handler. CONSTITUTION: A wafer transfer apparatus includes a base(110), a robot arm portion(120), a handler(130), and a sensor(140). The base is rotated by a rotary shaft. The robot arm is located on the base in order to transfer a wafer by performing the rotational motion and the straight line motion. The handler is located at the front end portion of the robot arm portion in order to load the wafer. The sensor is installed at the handler in order to sense the wafer on the shifting line of the handler.
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