| 摘要 |
<p>PURPOSE: A workpiece receiving vessel and an opening/closing device for the same are provided to facilitate the opening work of a FOUP(front open unified pod), to reduce operating errors during opening/closing works, and to improve productivity of semiconductor devices by virtue of a reduction in a time required to perform opening/closing works. CONSTITUTION: The workpiece receiving vessel comprises a container configured to be opened at one surface thereof, a cover(104) for sealing the surface of the container to be opened, a locking unit formed at the cover, the locking unit having a bar(200) protruding outward from the cover and an elastic member(204) connected to the bar, the bar being moved by the deformation of the elastic member, and a frame unit having an insertion groove into which the protruded bar is inserted.</p> |
