| 摘要 |
The invention relates to a sensor for detecting a substance in a liquid.The sensor comprises a pillar shaped primary substrate and a sensor unit e.g.a cantilever connected to the primary substrate.The sensor comprises detecting means,e.g.in the form of a piezoresistive element,a strain gauge,a Si or C nanotube,a capacitor or a piezoresistor,for detecting a change of stress or mass generated on a surface area of the sensor unit,and an electric communication line for applying a voltage over said detection means,wherein at least one of the wires is integrated in the pillar shaped primary substrate.The sensor in the form of a cantilever may e.g.have a two−dimensional shape selected from the group consisting of square,rectangular,triangular,pentagonal,hexagonal,leaf shaped,circular and oval periphery.The primary substrate may be connected to a secondary substrate such as an electronic chip comprising contact pads corresponding with wire exits from the primary substrate. |
