发明名称 PROGRAMMABLE MEMORY ADDRESS AND DECODE CIRCUITS WITH ULTRA THIN VERTICAL BODY TRANSISTORS
摘要 Structures and method for programmable memory address and decode circuits with ultra thin vertical body transistor are provided. The memory address and decode circuits (200) includes a number of address lines and a number of output lines such that the address lines and the output lines form an array. A number of vertical pillars extend outwardly from a semiconductor substrate at intersections of output lines and address lines. Each pillar (201) includes a single crystalline first contact layer (204) and second contact layer (206) separated by an oxide (208). A number of single crystalline ultra thin vertical floating gate transistors that are selectively disposed adjacent the number of vertical pillars. Each single crystalline vertical floating gate transistor includes an ultra thin single crystalline vertical first source/drain region (214) coupled to the first contact layer, an ultra thin single crystalline vertical second source/drain region (216) coupled to the second contact layer, and an ultra thin single crystalline vertical body region (212) which opposes the oxide layer and couples the first and the second source/drain regions.
申请公布号 WO03063250(A1) 申请公布日期 2003.07.31
申请号 WO2002US03244 申请日期 2002.02.06
申请人 MICRON TECHNOLOGY, INC. 发明人 FORBES, LEONARD
分类号 H01L27/10;G11C7/00;G11C29/00;H01L21/336;H01L21/8247;H01L21/84;H01L27/108;H01L27/115;H01L27/12;H01L29/04;H01L29/786;H01L29/788;H01L29/792;H01L31/0328;H01L31/036;(IPC1-7):H01L27/108 主分类号 H01L27/10
代理机构 代理人
主权项
地址