LIQUID TREATING DEVICE, AND LIQUID TREATING METHOD

摘要

A liquid treating device having a light source comprises a base plate holding block for holding a base plate, and a frame body forming a liquid treating tank connected to the base plate and opened at the upper end and having an inner wall surface inclined with respect to the vertical direction of the base plate surface. Since the frame body has the inclined inner wall surface, the radiation light directed from the light source to the base plate can be prevented from casting a shadow over the base plate as it is obstructed by the inner wall surface or the radiation light reflected by this inner wall surface can be prevented from falling on the base plate or from having its uniformity impaired.