| 摘要 |
PROBLEM TO BE SOLVED: To provide a spin processing device which is capable of reducing the contamination of processing solutions by particles to an irreducible minimum when two types of processing solutions used for processing substrates are separated from each other for recovery. SOLUTION: A spin processing device is equipped with an annular wall 15 which partitions a processing tank into an inner space 37 and an outer space 38, an inner discharge pipe 54 and an outer discharge pipe 55 which are provided as communicating with the inner space 37 and the outer space 38 respectively, an annular upper cap 13 covering the peripheral part of a rotating table 46, a lower cap 12 which is set movable in a vertical direction in the processing tank and whose upper end is positioned outside of the inner peripheral edge of the upper end of the upper cap 13 in a radial direction and lower end confronts the annular wall 15, and a first cylinder which drives the lower cap 12 to move up for enabling either a first type of processing solution or a second type of processing solution flying off from the substrate to flow into the inner space 37 or move down for enabling the other type of processing solution flying from the substrate to flow into the outer space 38. COPYRIGHT: (C)2003,JPO |
