发明名称 APPARATUS AND METHOD FOR CLEANING TEST PROBES
摘要 <p>A probe cleaning apparatus for cleaning a probe tip use to test semiconductors dies having an abrasive substrate layer an a tacky gel layer on top of the abrasive surface of the abrasive substrate layer. The probe tip is cleaned by passing it through the tacky gel layer so that it comes in contact with the abrasive surface of the abrasive substrate, moving the probe tip across the abrasive surface of the substrate layer, and then removing the probe tip from the successive layers of the cleaning apparatus. The probe tip emerges from the cleaning apparatus free from debris associated with testing the semiconductor dies.</p>
申请公布号 WO03062322(A1) 申请公布日期 2003.07.31
申请号 WO2003US01577 申请日期 2003.01.16
申请人 FORMFACTOR, INC. 发明人 KHANDROS, IGOR, K.;ELDRIDGE, BENJAMIN, N.;FANG, TRELIANT;MATHIEU, GAETAN, L.;GRUBE, GARY, W.;DRUSH, MICHAEL, A.;BUCKHOLTZ, CHRISTOPHER, C.
分类号 A47L25/00;B08B1/00;B08B7/00;C08L83/05;C08L83/07;C08L83/08;G01R1/067;G01R3/00;H01L21/304;H01L21/66;(IPC1-7):C08L83/04;C08G77/06;G01R31/02 主分类号 A47L25/00
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